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Analysis of Multifunctional Vacuum Gauge Calibration

Release Date: November 22, 2017

The dynamic comparison method is used to calibrate the high-vacuum gauge. The method is to use the pressure-stabilizing chamber to establish a voltage stabilization source for the gas, and continuously inject the gas into the calibration chamber through a high-precision trim valve , while maintaining the molecular pump unit's pumping of the vacuum calibration chamber , And adjust the gas flow rate through the fine adjustment valve, so that the vacuum degree of the calibration chamber is maintained within the range of the calibrated vacuum degree. In order to ensure the stability of the airflow in the calibration chamber, a diffuser plate is designed for the diffuser at the entrance of the calibration chamber, and the gas flow is stabilized by a small orifice plate between the two ball chambers. This method is suitable for regulatory calibration in the range of 1 × 10-1 Pa ~ 1.0 × 10-4 Pa. Generally, the working background vacuum of the calibration room is better than 1 × 10-6 Pa. The standard gauge adopts Brooks' GP370 vacuum gauge, and the ion current parameters obtained by the quadrupole mass spectrometer are used to convert the corresponding partial pressure value. The trim valve uses an Agilent face-sealed valve.